Event
MSE Seminar - Dr. William E. Vanderlinde, Laboratory for Physical Sciences
Friday, September 12, 2008
1:00 p.m.
Rm. 2108, Chemical and Nuclear Engineering Bldg.
Annette Mateus
301 405 5207
amateus@umd.edu
Scanning Electron Microscopy at the Nanoscale
Rapidly decreasing feature sizes in micro- and nano-electronic devices demand ever higher resolution microscopy tools. The scanning electron microscope (SEM) remains one of the most flexible tools for high resolution imaging. Modern field emission scanning electron microscopes have a nominal spot size as small as 1 nm, but 1 nm resolution is seldom achieved on ordinary samples due to limitations with beam-sample interactions. The limitations on resolution in the SEM will be discussed, and methods will be presented which overcome these limitations including STEM-in-SEM, low-loss imaging, and image enhancement by blind deconvolution.
For more information, contact Annette Mateus at (301) 405-5207 or amateus@umd.edu.