Laboratory for Reliable Electronics
The Laboratory for Reliable Nanoelectronics is an advanced facility for semiconductor device process development, test structure design for reliability and Reliability measurements at the University of Maryland. It includes a broad variety of advanced materials processes and supporting processes for fabricating of devices and reliability test structures. To support these activities, the facility houses a wide variety of equipment for wet and dry semiconductor processes as well as analytical tools. It includes a UHV system for Atomic Layer Deposition and a MAS 400 mask aligner for high resolution contact lithography, an e-beam metallization chamber, sol-gel and photoresist spinners, annealing and oxidation furnaces, several optical microscopes as well as a variety of chemical gas sensors (RGAs, FTIR, acoustic sensors) for in-situ process diagnostics.
See Also: Microelectronics Devices Laboratory