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Laboratory for Advanced Materials Processing (LAMP)

Principal Investigator: 
2225 J.M. Patterson Building

The Laboratory for Advanced Materials Processing (LAMP) is a class 1000 clean room facility for semiconductor fabrication. It includes a broad variety of advanced materials processes and supporting processes for fabricating devices and test structures, such as lithography, metal deposition, polymer and sol-gel processing, chemical vapor deposition, atomic layer deposition, and associated metrology and test equipment. It also supports materials and process research in chemical processes, sensors, and process control.