The Laboratory for Advanced Materials Processing (LAMP) is a class 1000 clean room facility for semiconductor fabrication. It includes a broad variety of advanced materials processes and supporting processes for fabricating devices and test structures, such as lithography, metal deposition, polymer and sol-gel processing, chemical vapor deposition, atomic layer deposition, and associated metrology and test equipment. It also supports materials and process research in chemical processes, sensors, and process control.
Gary RubloffDistinguished University Professor
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