Ph.D., University of Chicago, 1971
Multifunctional nanostructures for energy storage and capture, biofabrication in MEMS microsystems, biomedical and sensor applications, atomic layer deposition (ALD) process, mechanisms, and technology, nanoscale devices for quantum computing.
Prior to joining the faculty of the A. James Clark School of Engineering at the University of Maryland, Professor Rubloff served as the associate director of North Carolina State University's NSF Engineering Research Center for Advanced Electronic Materials Processing and as an adjunct professor of electrical engineering at Yale University. Before pursuing a career in academia, he served for 20 years in a variety of research and management positions at IBM's Thomas J. Watson Research Center in Yorktown Heights, N.Y.
Professor Rubloff is a past director of the Instutute for Systems Research, of which he remains an active member.
Current Research Projects
For detailed information about these projects, please visit Professor Rubloff's web site
Biological Microsystems and Biomaterials
- Programmable deposition of chitosan for biofunctionalization
- Biomolecular assembly on chitosan
- Enzyme assembly and activity in bioMEMS
- Bacterial signaling and quorum sensing
- BioMEMS devices, process integration, packaging, and control
- Real-time and in-situ diagnostics in bioMEMS
Nanostructures and Energy Applications
- Nanostructures for Energy Devices
- Characterization of multilayer structures in nanopores
- AAO-ALD nanodevices and energy systems
Electronic Materials and Processes
- Atomic layer deposition (ALD)
- ALD-based Josephson junctions for quantum computing
- Programmable and combinatorial chemical vapor deposition
- Semiconductor materials, processing, and characterization
- Sensing and advanced process control for widegap semiconductor growth
- Real-time chemical process sensing for metrology and advanced process control
- Simulation and optimization in dynamic process systems
Professor Rubloff currently teaches or has taught the following courses:
- ENMA 465: Microprocessing of Materials (also offered as ENMA 489B)
- ENMA 490: Materials Design: Capstone Design Course
- ENMA 659S: Systems Design for Microelectronics Manufacturing Processes (also offered as "Materials and Processes for Microelectronics")
Please visit Professor Rubloff's web site to learn more about his industry short courses and courses he has taught for the Department of Electrical and Computer Engineering.
Honors and Awards
- AVS Gaede-Langmuir Prize, 2000 “for the inventive application of surface science and vacuum technology to the semiconductor industry, and for fostering an effective bridge between AVS research and manufacturing”. This award is presented biennially “to recognize and encourage outstanding discoveries and inventions in the sciences and technologies of interest to the American Vacuum Society."
- Six IBM Invention Acheivement Awards
- IBM Research Division Award for MCP Chromium Metallurgy, 1986
Professor Rubloff is currently a member of the following professional societies:
Professor Rubloff has been very active in industry and consortium activities, consulting, professional societies, government agency activities (including the DOE and NSF), and in service to the University of Maryland through advising, teaching, and his participation in department, college and university-level committees. He has also served on the editorial boards of a variety of publications, and on professional conference program committees. Please see Professor Rubloff's C.V. (PDF) for a complete list of his academic, industrial, government and community service activities.
Professor Rubloff has published over 210 peer-reviewed papers. For a complete list of publications, please visit his web site
“Integration of Diverse Biological Materials in Micro/Nano Devices”, Reza Ghodssi, Peter Dykstra, Mariana Meyer, Stephan Koev, Konstantinos Gerasopoulos, Xiaolong Luo, Gary Rubloff, William Bentley, Gregory Payne, James Culver, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators, NATO Science for Peace and Security Series B: Physics and Biophysics. ISBN 978-90-481-3805-0. Springer Science+Business Media B.V., 2010, p. 275; DOI: 10.1007/978-90-481-3807-4_22
“Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films”, Parag Banerjee, Won-Jae Lee, Ki Ryeol Bae, Sang Bok Lee, and Gary W. Rubloff, J.Appl. Phys. 108 (4), 043504 (17 Aug 2010), DOI: 10.1063/1.3466987.
“Chitosan: An Integrative Biomaterial for Lab-on-a-chip Devices”, S. T. Koev, P. H. Dykstra, X. Luo, G.W. Rubloff, W.E. Bentley, G.F. Payne, and R. Ghodssi, Lab on a Chip 10, 3026-3042 (2010), DOI: 10.1039/C0LC00047G.
“Biofabrication to build the biology-device interface”, Yi Liu, Eunkyoung Kim, Reza Ghodssi, Gary W. Rubloff, James N. Culver, William E. Bentley, and Gregory F. Payne, Biofabrication 2, 1-21, 022002, DOI: 10.1088/1758-5082/2/2/022002.
“Profile evolution for conformal atomic layer deposition over nanotopography”, Erin R. Cleveland, Parag Banerjee, Israel Perez, Sang Bok Lee, and Gary W. Rubloff, ACS Nano (14 Jul 2010), DOI: 10.1021/nn1009984
“In situ quantitative visualization and characterization of chitosan electrodeposition with paired sidewall electrodes”, Yi Cheng, Xiaolong Luo, Jordan Betz, Susan Buckhout-White, Omar Bekdash, Gregory F. Payne, William E. Bentley, and Gary W. Rubloff, Soft Matter 6, 3177-3183 (2010), DOI:10.1039/C0SM00124D.
“Chitosan to electroaddress biological components in lab-on-a-chip devices”, Y. Liu, X.-W. Shi, E. Kim, L. M. Robinson, C. K. Nye, R. Ghodssi, G. W. Rubloff, W. E. Bentley, and G. F. Payne, Carbohydrate Polymers (2010); DOI: 10.1016/j.carbpol.2010.03.038.
“In-Film Bioprocessing and Immunoanalysis with Electroaddressable Stimuli-Responsive Polysaccharides”, Xiaohua Yang, Eunkyoung Kim, Yi Liu, Xiao-Wen Shi, Gary W. Rubloff, Reza Ghodssi, William E. Bentley, Zeev Pancer, and Gregory F. Payne, Adv. Functional Mat. 20, 1645-1652 (2010), DOI: 10.1002/adfm.200902092
“Biological nanofactories facilitate spatially-selective capture and manipulation of quorum sensing bacteria in a bioMEMS device”, Rohan Fernandes, Xiaolong Luo, Chen-Yu Tsao, Reza Ghodssi, Gary W. Rubloff, and William E. Bentley, Lab on Chip 10, 1128-1134 (2010), DOI: 10.1039/b926846d
“ALD-based Metal-insulator-metal (MIM) Nanocapacitors for Energy Storage", Parag Banerjee, Israel Perez, Laurent Henn-Lecordier, Sang Bok Lee,and Gary Rubloff, ECS Transactions 25 (4), 345-353 (2009).
For a complete list of invited seminars and presentations, please visit Professor Rubloff's web site
“Nanostructures for Energy Storage: What Can We Learn from Imaging and Spectroscopy?”, Gary W. Rubloff, DOE-BES Electron and Scanning Probe Microscopies Contractors Meeting 2010, Warrenton, VA, Oct. 3-6, 2010.
“Designing Nanostructures for Energy”, Gary W. Rubloff, Center for Integrated Nanotechnologies (CINT) Users Conference, Albuquerque, NM, Aug. 9-11, 2010.
“Bringing It All Together: a Central Role for the Maryland NanoCenter”, Gary W. Rubloff, First University of Maryland – Hanyang University International Symposium on Advanced Functional Materials, Fusion Technology Center, Hanyang University, Seoul, Korea, Jan. 21, 2010.
“Scaling Down to Nano: Revolutions in Science and Applications”, Gary W. Rubloff, 2010 KAISTUMD Symposium, Korea Advanced Institute for Science and Technology, Daejon, Korea, Jan. 18-20, 2010.
“Chitosan to electroaddress biological components in lab-on-a-chip devices”, Y. Liu, X.-W. Shi, E. Kim, L. M. Robinson, C. K. Nye, R. Ghodssi, G. W. Rubloff, W. E. Bentley, G. F. Payne, 11th Int’l. Conf. on Chitin and Chitosan & 8th Asia-Pacific Chitin and Chitosan Symposium, Taipei, Taiwan, June 6-9, 2009.
“ALD Based Metal-Insulator-Metal Nanocapacitors for Energy Storage”, P. Banerjee, I. Perez, L. Henn-Lecordier, S. Lee, and G. W. Rubloff, 216th ECS Meeting, Vienna, Austria, Oct. 4-9, 2009.
"Surface chemistry controlling technology: multiscale spatial behavior in atomic layer deposition", Gary W. Rubloff, Laurent Henn-Lecordier, Erin Cleveland, Parag Banerjee, Israel Perez, EuroCVD-17 and CVD XVII, Vienna, Austria, Oct. 4-9, 2009.
“ALD – Enabling Nanostructure Devices for Energy”, Parag Banerjee, Israel Perez, Erin Cleveland, Laurent Henn-Lecordier, Sang Bok Lee, Gary W. Rubloff et .al., 9th Int’l. Conf. on Atomic Layer Deposition 2009, Monterey, Ca, July 19-22, 2009.
“Nanostructures for Energy Devices”, Gary W. Rubloff, Research Frontiers and Capability Gaps for Controlling and Designing Functional Materials, Los Alamos, NM, Jan. 20-22, 2009.
“Is there Vacuum in Nano?”, Gary W. Rubloff, Vacuum Technology and Coatings Exposition, Italian Vacuum Society, Milan, Italy, Oct. 6, 2007.