Event
MSE Seminar Series: Valery Ray
Friday, February 20, 2015
1:00 p.m.-2:00 p.m.
Room 2110, Chemical and Nuclear Engineering Bldg.
JoAnne Kagle
301 405 5240
jkagle@umd.edu
To FIB or Not to FIB?
Science, art, possibilities, and limitations of Focused Ion Beam
Valery Ray
Research Associate
Institute for Research in Electronics & Applied Physics (IREAP)
and
Nanoscale Imaging, Spectroscopy & Propertes (NISP) Lab
Maryland NanoCenter
University of Maryland
Focused Ion Beam technology and FIB/SEM instrumentation have become commonplace in industrial and academic analytical laboratories. While basic push-button operation of modern computerized FIB instruments is straight-forward, final results are still heavily dependent on qualification of the operator and thorough planning based on understanding of underlying physical phenomena. We will review underlying principles of Focused Ion Beam technology from the perspective of end-user, discuss analytical and patterning possibilities offered by modern instrumentation, and outline limitations inherent to Focused Ion Beam technology.
