The Laboratory for Reliable Nanoelectronics is an advanced facility for semiconductor device process development, test structure design for reliability and Reliability measurements at the University of Maryland. It includes a broad variety of advanced materials processes and supporting processes for fabricating of devices and reliability test structures. To support these activities, the facility houses a wide variety of equipment for wet and dry semiconductor processes as well as analytical tools. It includes a UHV system for Atomic Layer Deposition and a MAS 400 mask aligner for high resolution contact lithography, an e-beam metallization chamber, sol-gel and photoresist spinners, annealing and oxidation furnaces, several optical microscopes as well as a variety of chemical gas sensors (RGAs, FTIR, acoustic sensors) for in-situ process diagnostics.
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