Faculty Directory

My research lies at the intersection of thin-film materials synthesis, solid-state electrochemistry, and semiconductor process engineering, advancing the science and technology of next-generation solid-state iontronic devices such as microbatteries and ionic capacitors. By combining atomic and molecular layer deposition with engineered nanoporous architectures, I have developed semiconductor-compatible platforms that enable precise control over material interfaces and device geometries—including high aspect-ratio structures inaccessible by conventional routes.

My work has been widely published in nanotechnology, surface chemistry, and solid-state ionics, and has been supported by industry partners as well as major funding agencies including the U.S. Department of Energy, NSF, and international collaborators. Current efforts, supported by a $2.6M DOE AMMTO award, focus on scaling up 3D microbatteries to 200 mm wafers and integrating them into advanced device architectures with transformative implications for microelectronics, energy storage, and emerging iontronic technologies.

Education

• Ph.D., Materials Science and Engineering, University of Maryland (2013)
• M.S., Applied Physics, University of Massachusetts (2006)
• B.A., Physics, Connecticut State University

Google Scholar

My research focuses on thin-film materials synthesis, solid-state electrochemistry, and semiconductor process engineering for next-generation iontronic devices. I am particularly interested in developing semiconductor-compatible solid-state ion-conducting and ion-storing materials, and in understanding transport across these interfaces. Using atomic and molecular layer deposition combined with engineered nanoporous architectures, I explore how precise control of materials and interfaces at the nanoscale can enable new energy storage and electronic platforms, including microbatteries and ionic capacitors.

For a full list please see my google scholar profile.

1. Alexander Pearse, Thomas Schmitt, Emily Sahadeo, David M Stewart, Alexander Kozen, Konstantinos Gerasopoulos, A Alec Talin, Sang Bok Lee, Gary W Rubloff, Keith E Gregorczyk. Three-dimensional solid-state lithium-ion batteries fabricated by conformal vapor-phase chemistry. ACS Nano, 12, 5, 4286-4294. 2018. DOI: 10.1021/acsnano.7b08751
2. Haotian Wang, Keith E Gregorczyk, Sang Bok Lee, Gary W. Rubloff, Chuan-Fu Lin. Li-Containing Organic Thin Film – Structure of Lithium Propane Dioxide via Molecular Layer Deposition. The Journal of Physical Chemistry C., 124, 12, 6830-6837. 2020. DOI: 10.1021/acs.jpcc.9b1186
3. R. Blake Nuwayhid, Angelique Jarry, Gary W. Rubloff, Keith E. Gregorczyk. Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor. ACS applied materials & interfaces, 12, 19, 21641-21650. 2020. DOI: 10.1021/acsami.0c03578
4. (INVITED) R Blake Nuwayhid, Daniela Fontecha, Alexander C Kozen, Angelique Jarry, Sang Bok Lee, Gary W Rubloff, Keith E Gregorczyk. Nanoscale Li, Na, and K ion conducting polyphosphazenes by atomic layer deposition. Dalton Transactions, 51, 5, 2068-2082. 2022. DOI: 10.1039/D1DT03736F
5. Daniela Fontecha, R Blake Nuwayhid, Alexander C Kozen, David M Stewart, Gary W Rubloff, Keith E Gregorczyk. Low temperature plasma-enhanced atomic layer deposition of sodium phosphorous oxynitride with tunable nitrogen content. Journal of Vacuum Science & Technology A, 40, 3. 2022. DOI: 10.1116/6.0001752
6. R Blake Nuwayhid, Alexander C Kozen, Daniel M Long, Kunal Ahuja, Gary W Rubloff, Keith E Gregorczyk. Dynamic Electrode-Electrolyte Intermixing in Solid-State Sodium Nano-Batteries. ACS Applied Materials & Interfaces, 15, 20, 24271-24283. 2023. DOI: 10.1021/acsami.2c23256
7. Nam Kim, Marco Casareto, Miles Mowbray, Robert Henry, John Hayden, Gary Rubloff, Sang Bok Lee, Keith E Gregorczyk. On-Wafer Wide-Pore Anodic Aluminum Oxide. Journal of The Electrochemical Society. 170, 6. 2023. DOI: 10.1149/1945-7111/acd87b
8. Kunal Ahuja, Valentin Sallaz, Ramsay Blake Nuwayhid, Frederic Voiron, Patrick McCluskey, Gary W Rubloff, Keith E Gregorczyk. Ultra-thin on-chip ALD LiPON capacitors for high frequency applications. Journal of Power Sources. 575, 233056. 2023. DOI: 10.1016/j.jpowsour.2023.233056
9. Daniela Fontecha, Alexander Kozen, David Stewart, Alex Hall, John Cumings, Gary Rubloff, and Keith Gregorczyk. Nanoscale Mixed Ion-Electron-Conducting NASICON-Type Thin Films: Lithium Titanium Phosphate via Atomic Layer Deposition. ACS Applied Materials & Interfaces. 17,17, 25358-25369. 2025. DOI: 10.1021/acsami.5c02201
10. Darrin Liau, Haotian Wang, Alexander C. Kozen, Sang Bok Leea, Gary Rubloff, Keith E. Gregorczyk. Molecular Layer Deposition of a Polymeric Crown Ether. Journal of Vacuum Science & Technology A. 43, 053409. 2025. DOI:10.1116/6.000474