Gottlieb Oehrlein Inducted to Plasma Materials Science Hall of Fame
Gottlieb Oehrlein, University of Maryland (UMD) professor of Materials Science and Engineering (MSE), has been awarded the 2023 Plasma Materials Science Hall of Fame Prize for “excellent achievements in fundamental research on non-equilibrium physicochemical reactions at the interfaces between plasma and materials during plasma etching for microelectronics manufacturing, which have led plasma materials science for many years as a guiding principle for the research and development of ultra-fine processing technology”.
The Plasma Materials Science Award was established in 1997 by the Japan Society for the Promotion of Science with the aim of bringing together industrial, government, and academic researchers, in addition to engineers in the field of plasma materials science and technology in Japan.
In 2021, the Plasma Material Science Hall of Fame Prize was established in addition to the domestic Plasma Materials Science Award to promote international developments in the field and to acknowledge researchers and research groups with outstanding achievements and contributions to the field of plasma materials science.
In March 2023, Gottlieb Oehrlein was honored together with Prof. Masaharu Shiratani, Kyushu University, at a ceremony as part of the International Symposium ISPlasma2023/IC-PLANTS2023 in Gifu, Japan.
Past laureates of the Plasma Material Science Hall of Fame Prize are Prof. John Robertson, The University of Cambridge, Prof. Toyonobu Yoshida, The University of Tokyo, Prof. Mark J. Kushner, The University of Michigan, Prof. David B. Graves, Princeton University, and Prof. Kunihide Tachibana, Kyoto University.
Published April 24, 2023