Faculty Directory

Oehrlein, Gottlieb S.

Oehrlein, Gottlieb S.

Professor
Fellow, AVS
Fellow, International Plasma Chemistry Society
Fellow, International Union of Pure and Applied Chemistry
Materials Science and Engineering
Institute for Research in Electronics & Applied Physics
Maryland Energy Innovation Institute
2119 Chemical and Nuclear Engineering Building

EDUCATION

  • Ph.D., Physics, State University of New York at Albany, 1981
  • M.S., Physics, State University of New York at Albarny, 1978
  • Vordiplom, Physics, Wurzburg University, Germany, 1976

BACKGROUND

Professor Oehrlein received a Vordiplom in physics from Würzburg University (Germany) in 1976, and M.S. and Ph.D. degrees in physics from the State University of New York at Albany in 1978 and 1981, respectively. Prior to joining the A. James Clark School of Engineering at the University of Maryland in 2000, Professor Oehrlein was a member of the Department of Physics faculty at the State University of New York–Albany from 1993 to 2000, and a research staff member in IBM's Division of Research at the T.J. Watson Research Center, in Yorktown Heights, NY.

HONORS AND AWARDS

  • Distinguished Scholar-Teacher Award, University of Maryland (2024)
  • Nishizawa Award, International Symposium on Dry Process (2019)
  • John Thornton Memorial Award, American Vacuum Society (2019)
  • Most Valuable Reviewer, Journal of Vacuum Science and Technology (2019)
  • Fellow, International Plasma Chemistry Society (2017)
  • IBM Faculty Award (2010)
  • Plasma Prize, Plasma Science and Technology Division, American Vacuum Society (2005)
  • Invention of the Year Finalist for Method and Device for Nanoscale Plasma Processing of Materials (US Patent #7470329), UMD Office of Technology Commercialization (2003)
  • IBM Faculty Award (2002)
  • Fellow, International Union of Pure and Applied Chemistry (2000)
  • Fellow, American Vacuum Society (1998)
  • Thinker Award of Tegal Corporation, SEMICON West (1993)
  • Electronics Division Award of the Electrochemical Society (1992)
  • Six IBM Invention Plateau Awards (1982-1993)
  • IBM Outstanding Technical Achievement Award (1989)
  • Solid State Science and Technology Young Author's Award of the Electrochemical Society (1985)
  • State University of New York Chancellor's Honors Convocation Award for Academic Excellence and a Distinguished Dissertation (1982)
  • Fellow of the Institute of International Education, New York (1980)
  • Presidential Fellow, State University of New York, Albany (1978-1981)

Google Scholar