Faculty Directory

Phaneuf, Ray

Phaneuf, Ray

Member, Laboratory for Physical Sciences
Fellow, APS
Materials Science and Engineering
Maryland Energy Innovation Institute
Electrical and Computer Engineering
1108 Chemical and Nuclear Engineering Building


Ph.D., University of Wisconsin—Madison, 1985


Professor Ray Phaneuf joined UMD’s Department of Physics in 1985, where he used electron diffraction to study phase transformations on stepped Si(111) surfaces, resulting in the identification of a thermodynamically driven faceting associated with the formation of the (7x7) reconstruction. In 1989 he visited Ernst Bauer’s group in Clausthal, Germany, using low energy electron microscopy (LEEM) to image this faceting in real time. In 2000 he joined the Department of Materials Science and Engineering, and began studies of directed self-organization during growth and sublimation on semiconductor surfaces, using lithographic patterning. He was a founding member of the UM-MRSEC. In 2006 he was a visiting professor at the National Nanotechnology Laboratory, in Lecce, Italy. He is the founding director of the Interdisciplinary Minor in Nanoscience and Technology at the UMD. He is the author of more than 80 papers in archival journals, and has given over 40 invited talks on his work in the U.S., Europe and Japan. He was named the Laboratory for Physical Sciences Faculty Researcher of the year in 2002. In addition to MSE, he has affiliate positions in Physics and the Department of Electrical and Computer Engineering. His current research is in the fields of directing self-assembly of nanostructures at the mesoscale, plasmonics, and the application of nanotechnology to the conservation of cultural heritage.

Nanotechnology, surface physics, low energy electron microscopy, photoemission electron microscopy, scanned probe microscopies, templating for directed self-assembly.

Professor Phaneuf currently teaches or has taught the following courses:

  • ENES 100: Introduction to Engineering Design
  • ENMA 181: Introduction to Nanomaterials Seminar
  • ENMA 300: Introduction to Materials and Their Applications
  • ENMA 471: Diffusion, Kinetics and Phase Transformations
  • ENMA 490: Materials Design: Capstone Design Course
  • ENMA 698T: Nanotechnology Characterization


For a complete list of publications, please visit Professor Phaneuf's web site

  • “Characteristic Length Scales In Evolution Of Patterned Step Structure On Vicinal Si(111) Surface During High Temperature Annealing”, H-C. Kan, T. Kwon and R. J. PhaneufPhysical Review B 77, 205401-1,-6 (2008)
  •  “Fluorescence Enhancement from Size-selected Nanoparticles: The Role of an Active Substrate Substrate”, S.-H. Guo, S.-J. Tsai, H.-C.Kan, D.-H. Tsai, Michael R. Zachariah, and R. J. PhaneufAdvanced Materials, 20, 1424-1429 (2008)
  • “Near-surface modification of polystyrene by Ar+: Molecular dynamics simulations and experimental validation”, J. J. Végh*, D. Nest, D. B. Graves, R. Bruce, S. Engelmann, T. Kwon, R. J. Phaneuf, G. S. Oehrlein, B. K. Long and C. G. Willson, Applied Physics Letters 91, 233113-1,-3 (2007)
  •  “Plasma-surface interactions of model polymers for advanced photoresists using C4F8 /Ar discharges and energetic ion beams”, S. Engelmann, R. L. Bruce, T. Kwon, R. Phaneuf, G. S. Oehrlein*, Y. C. Bae, C. Andes, D. Graves and D. Nest, E. A. Hudson, P. Lazzeri, E.Iacob, and M. Anderle, Journal of Vacuum Science and Technology 25, 1353-1364 (2007)
  • “Spatial and Size-Resolved Electrostatic-Directed Deposition of Nanoparticles on a Field-Generating Substrate: Theoretical and Experimental Analysis”, D.-H. Tsai, T. Hawa, H.-C. Kan, R. J. Phaneuf, and M. R. Zachariah, Nanotechnology 18, 365201-36510 (2007)
  • “Transient Roughening Behavior and Spontaneous Pattern Formation during Plasma Etching of Nanoporous Silica”, T. Kwon, H.-C. Kan, G. S. Oehrlein, and R.J. PhaneufNanotechnology, 18, 055305-055309 (2007)
  • “Temperature-Driven Change in the Unstable Growth Mode on Patterned GaAs(001)”, T. Tadayyon-Eslami, H.-C. Kan, L. C. Calhoun and R. J. PhaneufPhysical Review Letters 97, 126101-1,-4 (2006)
  • “Evolution of Patterned GaAs(001) during Homoepitaxial Growth: Size vs. Spacing,”  H.-C. Kan, R. Ankam, S. Shah, K.M. Micholsky, T. Tadayyon-Eslami, L. Calhoun, and R. J. Phaneuf, Phys. Rev. B 73, 195410-1,-8 (2006).

Seven Current and Former Maryland MSE Students to Attend 73rd Lindau Nobel Laureate Meeting

The scholars will travel to Lindau, Germany in late June for a week-long discussion spanning the future of physics.

MSE Student Awarded Prestigious Fulbright Scholarship to Research Abroad

Gillian Boyce receives Fulbright Scholarship to conduct her research project in Italy.

2020 Capstone Winners Move Research Project to APL for Development

Team MOFIA project, selected for funding by the John Hopkins APL NATURE Pop-up Challenge, to be developed further.

MSE Ph.D. Student Sabrina Curtis Invited to Attend 70th Lindau Nobel Laureate Meeting

Meeting scheduled to take place June 28 - July3, 2020, in Lindau, Germany.

Clark School Professor Elected 2019 APS Fellows

MSE Professor Raymond Phaneuf was honored in September.

MSE Hosts University Materials Council Spring 2019 Meeting

Chairs from across the country gathered to review MSE activities at UMD.

MSE Alumna Julia Downing Wins NSF Graduate Research Fellowship

Downing's research focuses on scalable manufacturing of 2D nanomaterials.

Mimi Hiebert Recognized for Outstanding Research

Hiebert will receive her award for Outstanding Research Assistant in May.

2018 MSE Capstone Students Offer Designs from Concept to Product

ENMA 490 students, taught by MSE Chair Raymond Phaneuf, use what they've learned throughout their tenure to create innovative engineering designs.

Olivia Noble Recognized by the Clark School of Engineering

Noble received an award at a ceremony April 26 for her 20 years of service to UMD.

MSE Ph.D. Candidate Michael Van Order Discusses Study Abroad Experience

Van Order conducted a semester abroad/internship at TU Dresden last summer, and shares his experience here.

MSE Students Selected as Finalists for the 2017 Collegiate Inventors Competition

Stretchable Silicon Photovoltaics is a new design for silicon solar cells.

Ph.D. Candidate Miriam Hiebert Wins Smithsonian Fellowship

Award will allow Hiebert to extend her work at the Museum Conservation Institute.

Engineering the Preservation of Cultural Heritage

Mimi Hiebert first became fascinated with studying and preserving antiquities thanks to an Egyptian mummy named “Tia.”

Prof. Ray Phaneuf Appointed Acting Chair of Materials Science and Engineering

Professor Robert M. Briber named Clark School Associate Dean for Research.

New Software Will Enhance Materials Science and Engineering’s Undergraduate Program

UMD wins one of six computational design toolkits from ASM International.

Former MSE Postdoc Featured in The Neuron

Timothy Corrigan’s work highlighted by W.V. Division of Science & Research.

Vote Now! Materials Video Enters Thinkable Competition

»Marquardt showcases conservation work in pursuit of $5K Open Innovation Award.

Museum Conservation Research Wins Top Prizes in International 3-Minute Thesis Competition

Amy Marquardt uses nanotechnology and materials science to design protective coatings for silver art, artifacts.

"Diamond Ranking" for MSE Grad Student Research

Marquardt honored by American Ceramics Society.

Vote Now! Materials Grad Student is Finalist in 3 Minute Thesis Competition (VIDEO)

Amy Marquardt uses nanotechnology to protect silver art and artifacts.

Phaneuf Delivers Keynote on Conservation Research

Professor presents work on nanocoatings used to protect art and artifacts.

2014 Dean's Student Research Awards Announced

Graduate students recognized for high quality engineering research

Marquardt Wins Dean’s Doctoral Research Award for “Protecting Art with Nanotechnology”

Grad student partners with conservators to save works in silver and bronze.

NSF Graduate Research Fellowships and Honorable Mentions

MSE alumnus and current students recognized by National Science Foundation.

Using Materials Science and Engineering to Save Priceless Artifacts

Graduate student Amy Marquardt wins CIC-Smithsonian Fellowship.

Six graduate students participating in UMD-Trento research exchange

The program is part of a broad partnership between Maryland and Trento, Italy.

MSE Professors to Present Historical Preservation Work at Smithsonian-UMD Celebration

Livingston, Phaneuf will discuss preservation of stone and metal.

Atoms-Thick Coating Ready for First Test on Silver Artifact

Science covers efforts to protect objects in Walters Art Museum collection.

Marquardt Wins AVS Travel Grant

Grad student will attend American Vacuum Society Symposium, present work on protecting silver artifacts.

American Vacuum Society Covers Ongoing Efforts to Protect Silver Artifacts

MSE collaboration with Walters Art Museum uses nanotechnology to prevent tarnish.

ResearchFest 2012

Marquardt receives top prize; Chiang, Fernandes and Hsu also selected for honors.

Rubloff Talks Atomic Layer Deposition with C&EN

Article on thin films also highlights work of MSE grad student Konstantinos Gerasopoulos.

MSE Capstone 2011

Students create lab-on-a-chip device for use in targeted cancer therapy.

Oehrlein, Phaneuf Paper Among AVS' Most Downloaded

Work covers plasma-polymer interactions in photolithography at the nanoscale.

Materials Scientists, Conservators Join Forces to Preserve Silver Artifacts and Art

Team developing nanometers-thick, protective coatings using atomic layer deposition.

Marquardt Studies Patinas at Smithsonian Institution

Microscopy, spectroscopy and microanalysis used to analyze bronze art.

MSE Capstone 2010

Students design and create prototype dynamic MEMS microphone.

Phaneuf Invited to Aspen Institute Italia's Transatlantic Dialog

Professor participates in international discussions of science in social, political and economic contexts.

MSE Capstone 2009

Seniors present work on novel shape-memory polymer stent.

Phaneuf, Takeuchi Promoted to Full Professorship

New rank effective July 1, 2009.

Lin Takes 2nd in GRID Modeling and Simulation

Research explores nanostructure evolution on patterned surfaces.

Phaneuf Group Research Selected for VJBO

Paper covers nanoparticle-enhancement of fluorescence.

6 Professors Named 2008 Research Leaders

Briber, Phaneuf, Rabin, Rubloff, Takeuchi and Wuttig honored at luncheon.

Phaneuf Presents at Nanosteps, Selected for Virtual Journal

Work on nanostructures and templating continues to receive attention.

MSE Capstone 2008

Seniors tackle microfluidic mixing.

Bruce to Attend NSF Program in Australia

Program fosters collaborations, provides project leadership training.

Phaneuf Press Release Gets Noticed

Story on "growing" computers featured online, in print, on TV.

"Nature-Made" Computers

Clark School Engineers Teach Nature to "Grow" High-Tech Components

MSE Faculty Continues to Produce "Research Leaders"

Professors honored for their efforts to bring sponsored research funds to campus.

Phaneuf Group Presents at American Physical Society Meeting

Guo, Kan, Tsai, and Tadayyon-Eslami present recent work.

Phaneuf Set to Teach FDA Scientists

Course will cover microsopy and nanostructure characterization.

Phaneuf Invited to Lecture in Germany, Italy

Professor shares recent work on GaAs(001) mechanisms.

5 MSE Professors Recognized for Sponsored Research

Briber, Oehrlein, Phaneuf, Rubloff, and Wuttig honored at luncheon.

Phaneuf, Tadayyon-Eslami's Paper Accepted in Physical Review Letters

Work by professor and student in forthcoming issue.

Oehrlein and Phaneuf Receive NSF Grant for Nano Research

Two MSE professors were awarded a NSF-NIRT grant for $1.2M to investigate "Nanotechnological Manufacturing: Nanostructured Polymers Designed for Plasma/Energetic Beam Templating of Materials".

65th Annual Physical Electronic Conference

Taesoon Kwon and Tabassom Tadayyon-Eslami, both MSE graduate students working in Professor Raymond Phaneuf’s research group, participated in the 65th Annual Physical Electronics Conference, held at the University of Wisconsin campus in Madison, Wisconsin from June 20-22, 2005.

  • Fellow, American Physical Society