Faculty Directory

Rubloff, Gary

Rubloff, Gary

Distinguished University Professor
Minta Martin Professor of Engineering
Director, Nanostructures for Electrical Energy Storage
Fellow, APS
Fellow, AVS
Materials Science and Engineering
The Institute for Systems Research
Institute for Research in Electronics & Applied Physics
Maryland Energy Innovation Institute
Electrical and Computer Engineering
1134 Jeong H. Kim Engineering Building


  • Postdoctoral Fellow, Physics, Brown University, 1971-73
  • Ph.D., Physics, University of Chicago, 1971
  • M.S., Physics, University of Chicago, 1967
  • B.A., Physics, Dartmouth College, 1966


Dr. Rubloff has published more than 200 papers, holds 21 patents and holds 6 IBM Invention Achievement Awards. He won the AVS Gaede-Langmuir Prize in 2000 "for inventive application of surface science and vacuum technology to the semiconductor industry, and for fostering an effective bridge between AVS research and manufacturing." This award was established 1977 to recognize and encourage outstanding discoveries and inventions in the sciences and technologies of interest to the AVS. He is a Fellow of APS and AVS. His research has included solid state physics, surface physics and chemistry, interfaces, semiconductor materials and processing science and technology, process diagnostics and modeling, manufacturing science, combinatorial materials science, biomaterials and bioMEMS. His semiconductor process research has emphasized the elucidation of chemical and physical mechanisms involved in surface cleaning, thermal oxidation, chemical vapor deposition, and plasma etching, and in pursing these directions he pioneered the exploitation of ultrahigh vacuum process environments and their integration with in-situ surface and interface diagnostics.

Dr. Rubloff received his B.A. in Physics magna cum laude from Dartmouth College in 1966, his M.S. in 1967 and his Ph.D. in 1971 in Physics from the University of Chicago. He held a postdoctoral position in Physics at Brown University from 1971 to 1973. In 1973 he joined IBM Research, Yorktown Heights, NY, as a Research Staff Member in the Physical Sciences Department, were he worked on surface and interface science. In 1984-85 he served as Technical Assistant to the IBM Research Vice-President for Logic and Memory, and from 1985 to 1991 he continued his research while serving in several capacities as Manager of exploratory materials and processing in the Silicon Technology Department. From 1992-1993 he was Manager of Thin Film Process Modeling in the Manufacturing Research Department. From 1992 to 1997 he was also Professor Adjunct in Electrical Engineering at Yale University.

He joined academia in 1993 as Associate Director of the NSF Engineering Research Center for Advanced Electronic Materials Processing and Professor of Electrical and Computer Engineering at North Carolina State University, focusing on real-time process sensing, simulation, optimization, and control.

In 1996 he joined the University of Maryland as Professor in the Department of Materials Science and Engineering and the Institute for Systems Research. He served as Director of the Institute from 1996 to 2001. In 2004 he was named Minta Martin Professor of Engineering and assumed the position of founding Director of the Maryland NanoCenter. He is also an affiliate faculty member of the the Institute for Research in Electronics and Applied Physics (IREAP), the Department of Electrical and Computer Engineering, the Fischell Department of Bioengineering, and the Department of Chemical and Biomolecular Engineering.

Dr. Rubloff was the founding Chairman of the AVS Manufacturing Science and Technology Group from 1992-1997 and continues to serve on its Executive Committee. He has been a member of the Metrology Technical Working Group for the SIA's National Technology Roadmap for Semiconductors since its inception in 1994. He has been active in professional society work, including the Board of Directors of the AVS, Executive Committees of the AVS Electronic Materials and Processing Division, the APS Materials Physics Division, and the Editorial Board of the Journal of Vacuum Science and Technology. He has long been active in civic affairs, included 11 years service as an elected Member, Vice-President, and President of a local Board of Education in New York State.

Prior to joining the faculty of the A. James Clark School of Engineering at the University of Maryland, Professor Rubloff served as the associate director of North Carolina State University's NSF Engineering Research Center for Advanced Electronic Materials Processing and as an adjunct professor of electrical engineering at Yale University. Before pursuing a career in academia, he served for 20 years in a variety of research and management positions at IBM's Thomas J. Watson Research Center in Yorktown Heights, N.Y.

Professor Rubloff is a past director of the Institute for Systems Research, of which he remains an active member.


  • AVS Gaede-Langmuir Prize, 2000 “for the inventive application of surface science and vacuum technology to the semiconductor industry, and for fostering an effective bridge between AVS research and manufacturing”. This award is presented biennially “to recognize and encourage outstanding discoveries and inventions in the sciences and technologies of interest to the American Vacuum Society."
  • Fellow of the American Physical Society (1986)
  • Fellow of AVS (formerly American Vacuum Society) (1993)
  • Six IBM Invention Achievement Awards
  • IBM Research Division Award for MCP Chromium Metallurgy, 1986


  • APS 
  • AVS
  • IEEE
  • MRS

Professor Rubloff has been very active in industry and consortium activities, consulting, professional societies, government agency activities (including the DOE and NSF), and in service to the University of Maryland through advising, teaching, and his participation in department, college and university-level committees. He has also served on the editorial boards of a variety of publications, and on professional conference program committees. Please see Professor Rubloff's C.V. (PDF) for a complete list of his academic, industrial, government and community service activities.

Orcid: 0000-0002-1901-3982, Google Scholar

  • Multifunctional nanostructures for energy storage and capture
  • Atomic layer deposition (ALD) process, mechanisms, and technology
  • Nanoscale devices for quantum computing

For detailed information about these projects, please visit Professor Rubloff's website.

Nanostructures and Energy Applications
  • Nanostructures for Energy Devices
  • Characterization of multilayer structures in nanopores
  • AAO-ALD nanodevices and energy systems
Electronic Materials and Processes
  • Atomic layer deposition (ALD)
  • ALD-based Josephson junctions for quantum computing
  • Programmable and combinatorial chemical vapor deposition
  • Semiconductor materials, processing, and characterization
  • Sensing and advanced process control for widegap semiconductor growth
  • Real-time chemical process sensing for metrology and advanced process control
  • Simulation and optimization in dynamic process systems

Professor Rubloff currently teaches or has taught the following courses:

  • ENMA 465: Microprocessing of Materials (also offered as ENMA 489B)
  • ENMA 490: Materials Design: Capstone Design Course
  • ENMA 659S: Systems Design for Microelectronics Manufacturing Processes (also offered as "Materials and Processes for Microelectronics")

Please visit Professor Rubloff's web site to learn more about his industry short courses and courses he has taught for the Department of Electrical and Computer Engineering.


Professor Rubloff has published over 300 peer-reviewed papers. For a complete list of publications, please visit his web site

  • “Integration of Diverse Biological Materials in Micro/Nano Devices”, Reza Ghodssi, Peter Dykstra, Mariana Meyer, Stephan Koev, Konstantinos Gerasopoulos, Xiaolong Luo, Gary Rubloff, William Bentley, Gregory Payne, James Culver, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators, NATO Science for Peace and Security Series B: Physics and Biophysics. ISBN 978-90-481-3805-0. Springer Science+Business Media B.V., 2010, p. 275; DOI: 10.1007/978-90-481-3807-4_22
  • “Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films”, Parag Banerjee, Won-Jae Lee, Ki Ryeol Bae, Sang Bok Lee, and Gary W. Rubloff, J.Appl. Phys. 108 (4), 043504 (17 Aug 2010), DOI: 10.1063/1.3466987. 
  • “Chitosan: An Integrative Biomaterial for Lab-on-a-chip Devices”, S. T. Koev, P. H. Dykstra, X. Luo, G.W. Rubloff, W.E. Bentley, G.F. Payne, and R. Ghodssi, Lab on a Chip 10, 3026-3042 (2010), DOI: 10.1039/C0LC00047G.
  • “Biofabrication to build the biology-device interface”, Yi Liu, Eunkyoung Kim, Reza Ghodssi, Gary W. Rubloff, James N. Culver, William E. Bentley, and Gregory F. Payne, Biofabrication 2, 1-21, 022002, DOI: 10.1088/1758-5082/2/2/022002.
  • “Profile evolution for conformal atomic layer deposition over nanotopography”, Erin R. Cleveland, Parag Banerjee, Israel Perez, Sang Bok Lee, and Gary W. Rubloff, ACS Nano (14 Jul 2010), DOI: 10.1021/nn1009984
  • “In situ quantitative visualization and characterization of chitosan electrodeposition with paired sidewall electrodes”, Yi Cheng, Xiaolong Luo, Jordan Betz, Susan Buckhout-White, Omar Bekdash, Gregory F. Payne, William E. Bentley, and Gary W. Rubloff, Soft Matter 6, 3177-3183 (2010), DOI:10.1039/C0SM00124D.
  • “Chitosan to electroaddress biological components in lab-on-a-chip devices”, Y. Liu, X.-W. Shi, E. Kim, L. M. Robinson, C. K. Nye, R. Ghodssi, G. W. Rubloff, W. E. Bentley, and G. F. Payne, Carbohydrate Polymers (2010); DOI: 10.1016/j.carbpol.2010.03.038.
  • “In-Film Bioprocessing and Immunoanalysis with Electroaddressable Stimuli-Responsive Polysaccharides”, Xiaohua Yang, Eunkyoung Kim, Yi Liu, Xiao-Wen Shi, Gary W. Rubloff, Reza Ghodssi, William E. Bentley, Zeev Pancer, and Gregory F. Payne, Adv. Functional Mat. 20, 1645-1652 (2010), DOI: 10.1002/adfm.200902092
  • “Biological nanofactories facilitate spatially-selective capture and manipulation of quorum sensing bacteria in a bioMEMS device”, Rohan Fernandes, Xiaolong Luo, Chen-Yu Tsao, Reza Ghodssi, Gary W. Rubloff, and William E. Bentley, Lab on Chip 10, 1128-1134 (2010), DOI: 10.1039/b926846d
  • “ALD-based Metal-insulator-metal (MIM) Nanocapacitors for Energy Storage", Parag Banerjee, Israel Perez, Laurent Henn-Lecordier, Sang Bok Lee,and Gary Rubloff, ECS Transactions 25 (4), 345-353 (2009).

Rubloff and colleagues publish work on improving solid-state battery interface performance

New combination of techniques can correlate chemical and electronic properties.

Ten Maryland MSE Faculty Members Ranked in Top 2% of World Scientists

Elsevier releases updated science-wide database

MSE Ph.D. Student Daniela Fontecha Receives NSF Fellowship Award

Fontecha's research, which will focus on energy storage technology, will be supported  with a three-year stipend.

10 Maryland MSE Faculty Members Ranked in Top 2% of World Scientists

Report prepared by Stanford University experts.

UMD Makes U.S. DOE Solar District Cup Finals

The Solar District Cup challenges multidisciplinary student teams to design and model optimized distributed energy systems for a campus or urban district.

UMD Research Team Advances the Battery Revolution

Solid state energy storage research receives $2.25M in DOE funding.

MSE Ph.D. Student Sabrina Curtis Invited to Attend 70th Lindau Nobel Laureate Meeting

Meeting scheduled to take place June 28 - July3, 2020, in Lindau, Germany.

UMD Faculty Members to Lead U.S. Side of $18.4M U.S.-Israel Energy Center Project

Project will develop lithium and sodium metal solid-state-batteries for advanced energy storage applications.

Rubloff is PI for 'Customized Lithium Batteries for Mission Applications'

The 18-month DoE project will focus on the effects of ALD anode protection layers in lithium batteries.

Emily Hitz Named by Nature as One of Five Early Career Researchers in Materials Science

Hitz is an MSE Ph.D. student, advised by Liangbing Hu, conducting research on solid-state batteries.

MSE Alumna Julia Downing Wins NSF Graduate Research Fellowship

Downing's research focuses on scalable manufacturing of 2D nanomaterials.

How Will You Impact Society?

MSE Alumni Parag Banerjee ('11) discusses his tenure at UMD.

Gary Rubloff Keynote Speaker at IEEE Nanotechnology Conference

From Nanostructures to Mesoscale Architectures: Electrochemical Storage for Smart Things.

UMD Researchers Focus Energy on Current Collector Improvements

Research paper published in Advanced Energy Materials.

MSE Students Selected as Finalists for the 2017 Collegiate Inventors Competition

Stretchable Silicon Photovoltaics is a new design for silicon solar cells.

MSE PhD Student Receives 3-Year NASA Fellowship

Emily Hitz is one of only five recipients of Aeronautics Scholarships and Advanced STEM Training and Research Fellowship.

Alexander Pearse wins Dean's Doctoral Research Award

Advised by Gary Rubloff, his research is titled, "Development of Vapor-Phase Deposited Three Dimensional All-Solid-State Batteries."

MSE Undergrad Offers Oral Presentaion at ECS Meeting

John Hayden will speak on Nanocarbon Current Collectors for Aqueous Batteries.

MSE Student Receives Wells Fellowship

MSE Graduate Student, Emily Hitz, is one of three students to receive the 2017 Harry K. Wells Graduate Fellowships from the Clark School of Engineering.

NanoCenter thanks departing co-founder

High-tech fabrication technique produces departure gift

Gary Rubloff named Distinguished University Professor

Rubloff receives highest academic honor conferred by the University of Maryland.

Rubloff Discusses UMD Energy Storage Center and Energy Science Hot Topics

UMD prof and center director on Electrochemical Society meeting podcast

Gary Rubloff to receive Senior Faculty Outstanding Research Award

Clark School honor celebrates strong and influential research.

Experts available for comment on upcoming Nobels

Lithium-ion batteries and nanowires are candidates for chemistry and physics prizes; UMD scientists can explain importance

Mesoscale Science Research Highlighted on Materials Journal Cover

Rubloff and Lee show new direction in electrical energy storage

New Battery Demonstrates “Sweet Spot” of Electrolyte Thickness and Composition

Atom-scale synthesis makes highly conductive LiPON for solid-state battery

Gu, Kozen Take 2nd in 2015 Dean’s Masters and Ph.D. Competition

Students recognized for exceptional graduate research.

Food Safety, Energy Storage & Video Authentication Inventions Honored at Awards Ceremony

Three Clark School innovations win UMD Invention of the Year Awards

MSE Announces 2015 Thesis and Dissertation Awards

Gu, Kozen will represent MSE in Dean’s Clark School-level competition.

Rubloff One of 9 Finalists for UMD Invention of the Year

Office of Technology Commercialization to announce winners at the Celebration of Innovation and Partnerships, April 29.

A Billion Holes Can Make a Battery

Battery inside a nanopore has commercial potential

Atomic Layer Depostion and Graphene Inspire Creative Catalyst Design

Hulka Energy Research Fellowship supports MSE student's design of new photoelectrochemical composites.

UMD Researchers Bridge Gap between Microelectronics, Biological Systems

“Electronic modulation of biochemical signal generation” published in Nature Nanotechnology

Department of Energy renews NEES EFRC for four years

The center develops highly ordered nanostructures that offer a unique way of looking at the science of energy storage.

Save the Date: NanoDay, June 11 -- Poster Session, Plenaries, EM Workshops and More

Registration and poster abstract submission will open soon

Over Half of Tenured MSE Professors Are UMD "Research Leaders"

Division of Research honors faculty for funded research.

Rubloff, Ghodssi featured in JVST-A special issue

The Journal of Vacuum Science & Technology A is celebrating the 60th anniversary of the American Vacuum Society.

NSF Grants for Graphene Research Awarded to Hu, Rubloff

Research at the nano-scale nets university over half-million dollars in funding

Atoms-Thick Coating Ready for First Test on Silver Artifact

Science covers efforts to protect objects in Walters Art Museum collection.

Nano "Beads on a String" Could Advance Battery Technology

Pulsing with lithium, tiny silicon beads on a nanotube hold promise for better batteries.

Seven NanoCenter Members Named 2013 Future Faculty Fellows

Engineering Grad Students Selected to Prepare for Academic Career

Rubloff Co-Authors Major DoE Report on Emerging Energy Technologies

Publication focuses on opportunities in mesoscale science.

MSE Faculty Are UMD "Research Leaders"

Half of department's full-time faculty honored by Division of Research.

Award Funds Development of Solid-State, High Power Lithium-Air Battery

Schroeder named John and Maureen Hendricks Energy Research Fellow.

Kozen Selected for Future Faculty Program

Graduate student joins highly selective cohort.

Preventing Costly, Life-Threatening Catheter Infections

Deutsch Foundation-sponsored Clark School research offers multi-pronged attack on major medical problem.

Bacteria Programmed to Re-Create UMD Logo

Feat part of larger body of Clark School research into preventing infections.

MSE@UMD Grads: The Next Generation of Faculty, Part 1

Parag Banernjee (Ph.D. '11): Department of Mechanical Engineering & Materials Science at Washington University in St. Louis.

Gregorczyk Wins Second L-3 Fellowship

Award provides stipend, travel credit, tuition waiver, and discretionary funds.

Rubloff Talks Atomic Layer Deposition with C&EN

Article on thin films also highlights work of MSE grad student Konstantinos Gerasopoulos.

Systems Researchers Partner with Trento, Italy

Joint efforts to target bioengineering, renewable energy, nanomaterials, microsystems, education.

Rubloff quoted in story about DOE Energy Frontiers Research Centers

Rubloff says science should be "more use-inspired."

Rabin, Rubloff, Takeuchi, and Wachsman Present at Sustainability Workshop

Presentations covered fuel cells, storage, reclaimed waste heat, thermoelastic cooling.

"Pocket Change Spectroscopy" Improves Detection of Toxins, Explosives

Betz, Rubloff Highlighted in Chemical & Engineering News.

Takeuchi Elected APS Fellow

Cited for pioneering work in combinatorial materials science.

Banerjee's Self-Powered Solar Circuits Featured in Sierra Magazine

Article covers grad student's development of components for computers, phones, and other devices that don't require electricity, batteries or solar cells.

Materials Scientists, Conservators Join Forces to Preserve Silver Artifacts and Art

Team developing nanometers-thick, protective coatings using atomic layer deposition.

Gregorczyk Wins L-3 Graduate Research Fellowship

Award provides stipend, supports research and travel.

Work by grad student Parag Banerjee cited in MRS Bulletin

Paper by student of Gary Rubloff originally appeared in ACS Nano.

Banerjee Takes 3rd In Dean's Doctoral Research Award Competition

Student recognized for work on nanoscale energy storage solutions.

Rubloff Team Invention of the Year Could Revolutionize Electronics

Electrostatic nanocapacitors are high-powered, easy to manufacture.

Espy-Wilson, Rubloff Are Top UM Inventors

Speech enhancing algorithm, high-density energy storage cells named best of '09.

A Solar-Powered Circuit, But No Solar Cell Required

Breakthrough technology could lead to new light-powered devices.

Rubloff Team Wins $2.8M Army Grant

Funds support design of nano-tech coherent dielectric barriers for quantum computing.

Rubloff Group Research Selected for Highlights in Chemical Technology.

Paper covers advances in lab-on-a-chip technology.

5 Professors Named 2009 Research Leaders

Faculty honored by university for bringing substantial sponsored research funds to campus.

MSE Affiliate, Collaborator Named Director of ISR

Ghodssi to take office October 1.

UMERC/Nanocenter Team Named "Energy Frontier" Center

Cross-campus team works to improves electrical storage technologies.

Professors Present at Sustainability Workshop

Rubloff, Takeuchi discuss environment- and energy-related research.

MSE in Annual Invention Competition

Professors, students, enter in Life Science, Physical Science categories.

Banerjee Wins MSA Presidential Student Award

Graduate student honored for nanotube crystallization paper.

NanoCenter Improves Energy Storage Options

Maryland NanoCenter researchers create new device to store electrical energy.

Materials and Interface Nanotechnology Laboratory Opens

Research will include work on nanoparticles, nanowires.

Banerjee Named John and Maureen Hendricks Energy Research Fellow

Fellowship benefits Great Expectations campaign.

Banerjee Earns Patent for Magnetic/Flash Hybrid RAM

Graduate student developed the technology at Micron.

6 Professors Named 2008 Research Leaders

Briber, Phaneuf, Rabin, Rubloff, Takeuchi and Wuttig honored at luncheon.

Banerjee to Attend ICMR Winter School

Grad student focuses on energy generation, storage.

Advance in Creating in Vitro Programmable Biological Microfactories

Research team includes Bentley, Ghossi, Payne, Rubloff.

Banerjee Selected for Future Faculty Program

Graduate student joins highly selective cohort.

MSE Faculty Continues to Produce "Research Leaders"

Professors honored for their efforts to bring sponsored research funds to campus.

$2M NSF Grant for "Bacterial Communication"

Cellular and biomolecular engineering research to focus on biofunctionalized devices.

Davis Organizes International Conference on Calixarene Chemistry

Biennial conference to be held in College Park

5 MSE Professors Recognized for Sponsored Research

Briber, Oehrlein, Phaneuf, Rubloff, and Wuttig honored at luncheon.

$1 Million For Nano-Bio Initiative

Deutsch Foudation will fund Clark School bioengineering research on the nanoscale.

NSF Grant Enhances NISP Lab's Capabilities

$500k grant will benefit composition analysis and biological tissue characterization.

Crab Nano-Sensor Detects Dangerous Substances

A material found in crab shells is part of a new sensor system.

NanoCenter Funding Means Major Advances for MSE Department

New equipment and expanded capabilities to come.

Graduate Students Attend National and International Workshops

Students focus on transmission electron microscopy and neutron scattering in Chile and New Mexico.

MSE Graduate Student Wins Best Poster Award

Israel Perez honored at MEMS Alliance Special Topics Symposium.

  • APS, 1986

  • AVS, 1993