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Rubloff, Gary

Gary Rubloff
Minta Martin Professor of Engineering
Affiliate Professor, Chemical and Biomolecular Engineering
Fellow, APS and AVS
1128 Jeong H. Kim Engineering Building

News About This Professor


Ph.D., University of Chicago, 1971

Research Interests 

Multifunctional nanostructures for energy storage and capture, biofabrication in MEMS microsystems, biomedical and sensor applications, atomic layer deposition (ALD) process, mechanisms, and technology, nanoscale devices for quantum computing.


Prior to joining the faculty of the A. James Clark School of Engineering at the University of Maryland, Professor Rubloff served as the associate director of North Carolina State University's NSF Engineering Research Center for Advanced Electronic Materials Processing and as an adjunct professor of electrical engineering at Yale University. Before pursuing a career in academia, he served for 20 years in a variety of research and management positions at IBM's Thomas J. Watson Research Center in Yorktown Heights, N.Y.

Professor Rubloff is a past director of the Instutute for Systems Research, of which he remains an active member.

Current Research Projects 

For detailed information about these projects, please visit Professor Rubloff's web site

Biological Microsystems and Biomaterials
  • Programmable deposition of chitosan for biofunctionalization
  • Biomolecular assembly on chitosan
  • Enzyme assembly and activity in bioMEMS
  • Bacterial signaling and quorum sensing
  • BioMEMS devices, process integration, packaging, and control
  • Real-time and in-situ diagnostics in bioMEMS
Nanostructures and Energy Applications
  • Nanostructures for Energy Devices
  • Characterization of multilayer structures in nanopores
  • AAO-ALD nanodevices and energy systems
Electronic Materials and Processes
  • Atomic layer deposition (ALD)
  • ALD-based Josephson junctions for quantum computing
  • Programmable and combinatorial chemical vapor deposition
  • Semiconductor materials, processing, and characterization
  • Sensing and advanced process control for widegap semiconductor growth
  • Real-time chemical process sensing for metrology and advanced process control
  • Simulation and optimization in dynamic process systems


Professor Rubloff currently teaches or has taught the following courses:

  • ENMA 465: Microprocessing of Materials (also offered as ENMA 489B)
  • ENMA 490: Materials Design: Capstone Design Course
  • ENMA 659S: Systems Design for Microelectronics Manufacturing Processes (also offered as "Materials and Processes for Microelectronics")

Please visit Professor Rubloff's web site to learn more about his industry short courses and courses he has taught for the Department of Electrical and Computer Engineering.


Honors and Awards 

  • AVS Gaede-Langmuir Prize, 2000 “for the inventive application of surface science and vacuum technology to the semiconductor industry, and for fostering an effective bridge between AVS research and manufacturing”. This award is presented biennially “to recognize and encourage outstanding discoveries and inventions in the sciences and technologies of interest to the American Vacuum Society."
  • Six IBM Invention Acheivement Awards
  • IBM Research Division Award for MCP Chromium Metallurgy, 1986

Professional Memberships 

Professor Rubloff is currently a member of the following professional societies:

  • APS 
  • AVS
  • IEEE
  • MRS

Professor Rubloff has been very active in industry and consortium activities, consulting, professional societies, government agency activities (including the DOE and NSF), and in service to the University of Maryland through advising, teaching, and his participation in department, college and university-level committees. He has also served on the editorial boards of a variety of publications, and on professional conference program committees. Please see Professor Rubloff's C.V. (PDF) for a complete list of his academic, industrial, government and community service activities.

Selected Publications 

Professor Rubloff has published over 210 peer-reviewed papers. For a complete list of publications, please visit his web site

“Integration of Diverse Biological Materials in Micro/Nano Devices”, Reza Ghodssi, Peter Dykstra, Mariana Meyer, Stephan Koev, Konstantinos Gerasopoulos, Xiaolong Luo, Gary Rubloff, William Bentley, Gregory Payne, James Culver, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators, NATO Science for Peace and Security Series B: Physics and Biophysics. ISBN 978-90-481-3805-0. Springer Science+Business Media B.V., 2010, p. 275; DOI: 10.1007/978-90-481-3807-4_22

“Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films”, Parag Banerjee, Won-Jae Lee, Ki Ryeol Bae, Sang Bok Lee, and Gary W. Rubloff, J.Appl. Phys. 108 (4), 043504 (17 Aug 2010), DOI: 10.1063/1.3466987. 

“Chitosan: An Integrative Biomaterial for Lab-on-a-chip Devices”, S. T. Koev, P. H. Dykstra, X. Luo, G.W. Rubloff, W.E. Bentley, G.F. Payne, and R. Ghodssi, Lab on a Chip 10, 3026-3042 (2010), DOI: 10.1039/C0LC00047G.

“Biofabrication to build the biology-device interface”, Yi Liu, Eunkyoung Kim, Reza Ghodssi, Gary W. Rubloff, James N. Culver, William E. Bentley, and Gregory F. Payne, Biofabrication 2, 1-21, 022002, DOI: 10.1088/1758-5082/2/2/022002.

“Profile evolution for conformal atomic layer deposition over nanotopography”, Erin R. Cleveland, Parag Banerjee, Israel Perez, Sang Bok Lee, and Gary W. Rubloff, ACS Nano (14 Jul 2010), DOI: 10.1021/nn1009984

“In situ quantitative visualization and characterization of chitosan electrodeposition with paired sidewall electrodes”, Yi Cheng, Xiaolong Luo, Jordan Betz, Susan Buckhout-White, Omar Bekdash, Gregory F. Payne, William E. Bentley, and Gary W. Rubloff, Soft Matter 6, 3177-3183 (2010), DOI:10.1039/C0SM00124D.

“Chitosan to electroaddress biological components in lab-on-a-chip devices”, Y. Liu, X.-W. Shi, E. Kim, L. M. Robinson, C. K. Nye, R. Ghodssi, G. W. Rubloff, W. E. Bentley, and G. F. Payne, Carbohydrate Polymers (2010); DOI: 10.1016/j.carbpol.2010.03.038.

“In-Film Bioprocessing and Immunoanalysis with Electroaddressable Stimuli-Responsive Polysaccharides”, Xiaohua Yang, Eunkyoung Kim, Yi Liu, Xiao-Wen Shi, Gary W. Rubloff, Reza Ghodssi, William E. Bentley, Zeev Pancer, and Gregory F. Payne, Adv. Functional Mat. 20, 1645-1652 (2010), DOI: 10.1002/adfm.200902092

“Biological nanofactories facilitate spatially-selective capture and manipulation of quorum sensing bacteria in a bioMEMS device”, Rohan Fernandes, Xiaolong Luo, Chen-Yu Tsao, Reza Ghodssi, Gary W. Rubloff, and William E. Bentley, Lab on Chip 10, 1128-1134 (2010), DOI: 10.1039/b926846d

“ALD-based Metal-insulator-metal (MIM) Nanocapacitors for Energy Storage", Parag Banerjee, Israel Perez, Laurent Henn-Lecordier, Sang Bok Lee,and Gary Rubloff, ECS Transactions 25 (4), 345-353 (2009).

Selected Presentations 

For a complete list of invited seminars and presentations, please visit Professor Rubloff's web site

“Nanostructures for Energy Storage: What Can We Learn from Imaging and Spectroscopy?”, Gary W. Rubloff, DOE-BES Electron and Scanning Probe Microscopies Contractors Meeting 2010, Warrenton, VA, Oct. 3-6, 2010.

“Designing Nanostructures for Energy”, Gary W. Rubloff, Center for Integrated Nanotechnologies (CINT) Users Conference, Albuquerque, NM, Aug. 9-11, 2010.

“Bringing It All Together: a Central Role for the Maryland NanoCenter”, Gary W. Rubloff, First University of Maryland – Hanyang University International Symposium on Advanced Functional Materials, Fusion Technology Center, Hanyang University, Seoul, Korea, Jan. 21, 2010.

“Scaling Down to Nano: Revolutions in Science and Applications”, Gary W. Rubloff, 2010 KAISTUMD Symposium, Korea Advanced Institute for Science and Technology, Daejon, Korea, Jan. 18-20, 2010.

“Chitosan to electroaddress biological components in lab-on-a-chip devices”, Y. Liu, X.-W. Shi, E. Kim, L. M. Robinson, C. K. Nye, R. Ghodssi, G. W. Rubloff, W. E. Bentley, G. F. Payne, 11th Int’l. Conf. on Chitin and Chitosan & 8th Asia-Pacific Chitin and Chitosan Symposium, Taipei, Taiwan, June 6-9, 2009.

“ALD Based Metal-Insulator-Metal Nanocapacitors for Energy Storage”, P. Banerjee, I. Perez, L. Henn-Lecordier, S. Lee, and G. W. Rubloff, 216th ECS Meeting, Vienna, Austria, Oct. 4-9, 2009.

"Surface chemistry controlling technology: multiscale spatial behavior in atomic layer deposition", Gary W. Rubloff, Laurent Henn-Lecordier, Erin Cleveland, Parag Banerjee, Israel Perez, EuroCVD-17 and CVD XVII, Vienna, Austria, Oct. 4-9, 2009.

“ALD – Enabling Nanostructure Devices for Energy”, Parag Banerjee, Israel Perez, Erin Cleveland, Laurent Henn-Lecordier, Sang Bok Lee, Gary W. Rubloff et .al., 9th Int’l. Conf. on Atomic Layer Deposition 2009, Monterey, Ca, July 19-22, 2009.

“Nanostructures for Energy Devices”, Gary W. Rubloff, Research Frontiers and Capability Gaps for Controlling and Designing Functional Materials, Los Alamos, NM, Jan. 20-22, 2009.

“Is there Vacuum in Nano?”, Gary W. Rubloff, Vacuum Technology and Coatings Exposition, Italian Vacuum Society, Milan, Italy, Oct. 6, 2007.

Related News 

How Will You Impact Society?
MSE Alumni Parag Banerjee ('11) discusses his tenure at UMD. October 31, 2018

Gary Rubloff Keynote Speaker at IEEE Nanotechnology Conference
From Nanostructures to Mesoscale Architectures: Electrochemical Storage for Smart Things. July 25, 2018

UMD Researchers Focus Energy on Current Collector Improvements
Research paper published in Advanced Energy Materials. January 16, 2018

MSE Students Selected as Finalists for the 2017 Collegiate Inventors Competition
Stretchable Silicon Photovoltaics is a new design for silicon solar cells. September 25, 2017

MSE PhD Student Receives 3-Year NASA Fellowship
Emily Hitz is one of only five recipients of Aeronautics Scholarships and Advanced STEM Training and Research Fellowship. August 28, 2017

Alexander Pearse wins Dean's Doctoral Research Award
Advised by Gary Rubloff, his research is titled, "Development of Vapor-Phase Deposited Three Dimensional All-Solid-State Batteries." May 8, 2017

MSE Undergrad Offers Oral Presentaion at ECS Meeting
John Hayden will speak on Nanocarbon Current Collectors for Aqueous Batteries. March 31, 2017

MSE Student Receives Wells Fellowship
MSE Graduate Student, Emily Hitz, is one of three students to receive the 2017 Harry K. Wells Graduate Fellowships from the Clark School of Engineering. March 17, 2017

NanoCenter thanks departing co-founder
High-tech fabrication technique produces departure gift December 1, 2016

Gary Rubloff named Distinguished University Professor
Rubloff receives highest academic honor conferred by the University of Maryland. August 8, 2016

Rubloff Discusses UMD Energy Storage Center and Energy Science Hot Topics
UMD prof and center director on Electrochemical Society meeting podcast December 8, 2015

Gary Rubloff to receive Senior Faculty Outstanding Research Award
Clark School honor celebrates strong and influential research. November 4, 2015

Experts available for comment on upcoming Nobels
Lithium-ion batteries and nanowires are candidates for chemistry and physics prizes; UMD scientists can explain importance September 30, 2015

Mesoscale Science Research Highlighted on Materials Journal Cover
Rubloff and Lee show new direction in electrical energy storage September 9, 2015

New Battery Demonstrates “Sweet Spot” of Electrolyte Thickness and Composition
Atom-scale synthesis makes highly conductive LiPON for solid-state battery July 28, 2015

Cumings Named Interim Director of Maryland NanoCenter
Appointment effective July 1. July 5, 2015

Gu, Kozen Take 2nd in 2015 Dean’s Masters and Ph.D. Competition
Students recognized for exceptional graduate research. May 12, 2015

Food Safety, Energy Storage & Video Authentication Inventions Honored at Awards Ceremony
Three Clark School innovations win UMD Invention of the Year Awards April 30, 2015

MSE Announces 2015 Thesis and Dissertation Awards
Gu, Kozen will represent MSE in Dean’s Clark School-level competition. April 24, 2015

Rubloff One of 9 Finalists for UMD Invention of the Year
Office of Technology Commercialization to announce winners at the Celebration of Innovation and Partnerships, April 29. March 24, 2015

A Billion Holes Can Make a Battery
Battery inside a nanopore has commercial potential November 6, 2014

Atomic Layer Depostion and Graphene Inspire Creative Catalyst Design
Hulka Energy Research Fellowship supports MSE student's design of new photoelectrochemical composites. September 12, 2014

UMD Researchers Bridge Gap between Microelectronics, Biological Systems
“Electronic modulation of biochemical signal generation” published in Nature Nanotechnology July 28, 2014

Department of Energy renews NEES EFRC for four years
The center develops highly ordered nanostructures that offer a unique way of looking at the science of energy storage. June 20, 2014

Save the Date: NanoDay, June 11 -- Poster Session, Plenaries, EM Workshops and More
Registration and poster abstract submission will open soon March 25, 2014

Over Half of Tenured MSE Professors Are UMD "Research Leaders"
Division of Research honors faculty for funded research. December 3, 2013

Rubloff, Ghodssi featured in JVST-A special issue
The Journal of Vacuum Science & Technology A is celebrating the 60th anniversary of the American Vacuum Society. October 30, 2013

NSF Grants for Graphene Research Awarded to Hu, Rubloff
Research at the nano-scale nets university over half-million dollars in funding August 26, 2013

Atoms-Thick Coating Ready for First Test on Silver Artifact
Science covers efforts to protect objects in Walters Art Museum collection. April 19, 2013

Nano "Beads on a String" Could Advance Battery Technology
Pulsing with lithium, tiny silicon beads on a nanotube hold promise for better batteries. February 27, 2013

Seven NanoCenter Members Named 2013 Future Faculty Fellows
Engineering Grad Students Selected to Prepare for Academic Career January 15, 2013

Rubloff Co-Authors Major DoE Report on Emerging Energy Technologies
Publication focuses on opportunities in mesoscale science. December 5, 2012

MSE Faculty Are UMD "Research Leaders"
Half of department's full-time faculty honored by Division of Research. October 9, 2012

Award Funds Development of Solid-State, High Power Lithium-Air Battery
Schroeder named John and Maureen Hendricks Energy Research Fellow. March 2, 2012

Kozen Selected for Future Faculty Program
Graduate student joins highly selective cohort. February 10, 2012

Preventing Costly, Life-Threatening Catheter Infections
Deutsch Foundation-sponsored Clark School research offers multi-pronged attack on major medical problem. January 18, 2012

Bacteria Programmed to Re-Create UMD Logo
Feat part of larger body of Clark School research into preventing infections. December 13, 2011

MSE@UMD Grads: The Next Generation of Faculty, Part 1
Parag Banernjee (Ph.D. '11): Department of Mechanical Engineering & Materials Science at Washington University in St. Louis. November 30, 2011

Gregorczyk Wins Second L-3 Fellowship
Award provides stipend, travel credit, tuition waiver, and discretionary funds. September 26, 2011

Rubloff Talks Atomic Layer Deposition with C&EN
Article on thin films also highlights work of MSE grad student Konstantinos Gerasopoulos. August 2, 2011

Systems Researchers Partner with Trento, Italy
Joint efforts to target bioengineering, renewable energy, nanomaterials, microsystems, education. May 26, 2011

Rubloff quoted in story about DOE Energy Frontiers Research Centers
Rubloff says science should be "more use-inspired." May 25, 2011

Rabin, Rubloff, Takeuchi, and Wachsman Present at Sustainability Workshop
Presentations covered fuel cells, storage, reclaimed waste heat, thermoelastic cooling. April 26, 2011

"Pocket Change Spectroscopy" Improves Detection of Toxins, Explosives
Betz, Rubloff Highlighted in Chemical & Engineering News. April 25, 2011

Takeuchi Elected APS Fellow
Cited for pioneering work in combinatorial materials science. December 3, 2010

Banerjee's Self-Powered Solar Circuits Featured in Sierra Magazine
Article covers grad student's development of components for computers, phones, and other devices that don't require electricity, batteries or solar cells. November 22, 2010

Materials Scientists, Conservators Join Forces to Preserve Silver Artifacts and Art
Team developing nanometers-thick, protective coatings using atomic layer deposition. October 25, 2010

Gregorczyk Wins L-3 Graduate Research Fellowship
Award provides stipend, supports research and travel. October 14, 2010

Work by grad student Parag Banerjee cited in MRS Bulletin
Paper by student of Gary Rubloff originally appeared in ACS Nano. May 17, 2010

Banerjee Takes 3rd In Dean's Doctoral Research Award Competition
Student recognized for work on nanoscale energy storage solutions. May 6, 2010

Rubloff Team Invention of the Year Could Revolutionize Electronics
Electrostatic nanocapacitors are high-powered, easy to manufacture. May 4, 2010

Espy-Wilson, Rubloff Are Top UM Inventors
Speech enhancing algorithm, high-density energy storage cells named best of '09. April 14, 2010

A Solar-Powered Circuit, But No Solar Cell Required
Breakthrough technology could lead to new light-powered devices. March 23, 2010

Rubloff Team Wins $2.8M Army Grant
Funds support design of nano-tech coherent dielectric barriers for quantum computing. December 14, 2009

Rubloff Group Research Selected for Highlights in Chemical Technology.
Paper covers advances in lab-on-a-chip technology. November 20, 2009

5 Professors Named 2009 Research Leaders
Faculty honored by university for bringing substantial sponsored research funds to campus. October 15, 2009

MSE Affiliate, Collaborator Named Director of ISR
Ghodssi to take office October 1. September 22, 2009

UMERC/Nanocenter Team Named "Energy Frontier" Center
Cross-campus team works to improves electrical storage technologies. May 13, 2009

Professors Present at Sustainability Workshop
Rubloff, Takeuchi discuss environment- and energy-related research. May 8, 2009

MSE in Annual Invention Competition
Professors, students, enter in Life Science, Physical Science categories. April 8, 2009

Banerjee Wins MSA Presidential Student Award
Graduate student honored for nanotube crystallization paper. April 6, 2009

NanoCenter Improves Energy Storage Options
Maryland NanoCenter researchers create new device to store electrical energy. March 16, 2009

Materials and Interface Nanotechnology Laboratory Opens
Research will include work on nanoparticles, nanowires. November 20, 2008

Banerjee Named John and Maureen Hendricks Energy Research Fellow
Fellowship benefits Great Expectations campaign. November 19, 2008

Banerjee Earns Patent for Magnetic/Flash Hybrid RAM
Graduate student developed the technology at Micron. November 15, 2008

6 Professors Named 2008 Research Leaders
Briber, Phaneuf, Rabin, Rubloff, Takeuchi and Wuttig honored at luncheon. October 22, 2008

Banerjee to Attend ICMR Winter School
Grad student focuses on energy generation, storage. September 29, 2008

Nanocenter Team Among Invention of the Year Finalists
Team places 3rd in competition. May 8, 2008

Advance in Creating in Vitro Programmable Biological Microfactories
Research team includes Bentley, Ghossi, Payne, Rubloff. March 27, 2008

Banerjee Selected for Future Faculty Program
Graduate student joins highly selective cohort. February 1, 2008

MSE Faculty Continues to Produce "Research Leaders"
Professors honored for their efforts to bring sponsored research funds to campus. October 29, 2007

$2M NSF Grant for "Bacterial Communication"
Cellular and biomolecular engineering research to focus on biofunctionalized devices. August 28, 2007

Davis Organizes International Conference on Calixarene Chemistry
Biennial conference to be held in College Park August 2, 2007

5 MSE Professors Recognized for Sponsored Research
Briber, Oehrlein, Phaneuf, Rubloff, and Wuttig honored at luncheon. November 28, 2006

$1 Million For Nano-Bio Initiative
Deutsch Foudation will fund Clark School bioengineering research on the nanoscale. August 31, 2006

NSF Grant Enhances NISP Lab's Capabilities
$500k grant will benefit composition analysis and biological tissue characterization. August 29, 2006

Crab Nano-Sensor Detects Dangerous Substances
A material found in crab shells is part of a new sensor system. July 26, 2006

NanoCenter Funding Means Major Advances for MSE Department
New equipment and expanded capabilities to come. June 22, 2006

Graduate Students Attend National and International Workshops
Students focus on transmission electron microscopy and neutron scattering in Chile and New Mexico. June 1, 2006

MSE Graduate Student Wins Best Poster Award
Israel Perez honored at MEMS Alliance Special Topics Symposium. April 4, 2006